filename:TLM__MD_M003_S003_MIDAS__SCI__MTP003___COUNT_03.DAT
scan_file:SCAN_MD_M003_S003_2014-05-18T203225Z_TGT04
sw_ver:660
start_time:"2014-05-18 20:32:25.921826"
end_time:"2014-05-19 08:54:58.937405"
duration:"12:22:33.015579"
channel:ZS
tip_num:7
lin_pos:1.3226520180056458
tip_offset:-83.858968490119963
wheel_pos:64
target:4
target_type:SILICON
x_orig:38596
y_orig:38596
xsteps:288
x_step:41
x_step_nm:156.36743999999999
xlen_um:45.033822719999996
ysteps:288
y_step:41
y_step_nm:156.36743999999999
ylen_um:45.033822719999996
z_step:4.0
z_ret:1907
z_ret_nm:312.74799999999999
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:4
ac_gain:4
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:6.502021820401314
set_pt:5.2016479743648425
fadj:5.5266651407644769
ctrl_image:False
mag_phase:False
work_pt:5.851770031114517
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-106.37587985011996
y_orig_um:22.516911359999998