filename:TLM__MD_M004_S005_TARGET_SCAN__________COUNT_01.DAT
scan_file:SCAN_MD_M004_S005_2014-06-10T145726Z_TGT16
sw_ver:660
start_time:"2014-06-10 14:57:26.609659"
end_time:"2014-06-11 03:53:06.625933"
duration:"12:55:40.016274"
channel:ZS
tip_num:7
lin_pos:1.3220416571297779
tip_offset:-84.927100022888709
wheel_pos:256
target:16
target_type:SOLGEL
x_orig:38596
y_orig:38596
xsteps:288
x_step:41
x_step_nm:156.36743999999999
xlen_um:45.033822719999996
ysteps:288
y_step:41
y_step_nm:156.36743999999999
ylen_um:45.033822719999996
z_step:4.0
z_ret:1907
z_ret_nm:312.74799999999999
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:4
ac_gain:4
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:6.4892042420080855
set_pt:5.191271839475089
fadj:5.5156786449988555
ctrl_image:False
mag_phase:False
work_pt:5.840234308352467
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-107.4440113828887
y_orig_um:22.516911359999998