filename:TLM__MD_M004_S005_TARGET_SCAN__________COUNT_01.DAT
scan_file:SCAN_MD_M004_S005_2014-06-12T145822Z_TGT05
sw_ver:660
start_time:"2014-06-12 14:58:22.670102"
end_time:"2014-06-13 05:18:13.688141"
duration:"14:19:51.018039"
channel:ZS
tip_num:7
lin_pos:1.3211261158159762
tip_offset:-86.529297322041828
wheel_pos:80
target:5
target_type:SILICON
x_orig:40548
y_orig:40548
xsteps:416
x_step:19
x_step_nm:72.462959999999995
xlen_um:30.14459136
ysteps:416
y_step:19
y_step_nm:72.462959999999995
ylen_um:30.14459136
z_step:4.0
z_ret:884
z_ret_nm:144.976
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:4
ac_gain:4
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:6.7510490577553988
set_pt:5.4006256198977649
fadj:5.7381551842526886
ctrl_image:False
mag_phase:False
work_pt:6.07589264477716
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-101.60159300204182
y_orig_um:15.07229568