filename:TLM__MD_M004_S006_TARGET_SCAN__________COUNT_02.DAT
scan_file:SCAN_MD_M004_S006_2014-06-23T131217Z_TGT04
sw_ver:660
start_time:"2014-06-23 13:12:17.000201"
end_time:"2014-06-24 01:08:24.015225"
duration:"11:56:07.015024"
channel:ZS
tip_num:7
lin_pos:1.3208209353780422
tip_offset:-87.0633630884262
wheel_pos:64
target:4
target_type:SILICON
x_orig:38596
y_orig:38596
xsteps:288
x_step:41
x_step_nm:156.36743999999999
xlen_um:45.033822719999996
ysteps:288
y_step:41
y_step_nm:156.36743999999999
ylen_um:45.033822719999996
z_step:4.0
z_ret:1907
z_ret_nm:312.74799999999999
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:4
ac_gain:4
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:6.6982528419928293
set_pt:5.3585107194628829
fadj:5.6932936598764012
ctrl_image:False
mag_phase:False
work_pt:6.0283764534001545
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-109.5802744484262
y_orig_um:22.516911359999998