filename:TLM__MD_M004_S006_TARGET_SCAN__________COUNT_02.DAT
scan_file:SCAN_MD_M004_S006_2014-06-24T043355Z_TGT04
sw_ver:660
start_time:"2014-06-24 04:33:55.019537"
end_time:"2014-06-24 05:25:56.020628"
duration:"0:52:01.001091"
channel:ZS
tip_num:7
lin_pos:1.3214312962539101
tip_offset:-85.995231555657455
wheel_pos:64
target:4
target_type:SILICON
x_orig:43988
y_orig:43988
xsteps:128
x_step:8
x_step_nm:30.510719999999999
xlen_um:3.9053721599999998
ysteps:128
y_step:8
y_step_nm:30.510719999999999
ylen_um:3.9053721599999998
z_step:4.0
z_ret:372
z_ret_nm:61.008000000000003
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:4
ac_gain:4
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:6.7232776379034114
set_pt:5.3786526283665221
fadj:5.7146562905317762
ctrl_image:False
mag_phase:False
work_pt:6.050898578792723
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-87.947917635657447
y_orig_um:1.9526860799999999