filename:TLM__MD_M005_S010_TARGET_SCAN__________COUNT_04.DAT
scan_file:SCAN_MD_M005_S010_2014-07-28T115722Z_TGT06
sw_ver:660
start_time:"2014-07-28 11:57:22.056026"
end_time:"2014-07-28 23:47:24.070923"
duration:"11:50:02.014897"
channel:ZS
tip_num:7
lin_pos:1.296406500343328
tip_offset:-129.78862439917603
wheel_pos:96
target:6
target_type:SILICON
x_orig:37940
y_orig:39252
xsteps:320
x_step:41
x_step_nm:156.36743999999999
xlen_um:50.037580799999994
ysteps:256
y_step:41
y_step_nm:156.36743999999999
ylen_um:40.030064639999999
z_step:4.0
z_ret:1907
z_ret_nm:312.74799999999999
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:4
ac_gain:4
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:6.0152590218966964
set_pt:4.8122377355611512
fadj:5.1128404669260696
ctrl_image:False
mag_phase:False
work_pt:5.413687226222462
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-154.807414799176
y_orig_um:20.01503232