filename:TLM__MD_M005_S010_TARGET_SCAN__________COUNT_04.DAT
scan_file:SCAN_MD_M005_S010_2014-07-30T033717Z_TGT06
sw_ver:660
start_time:"2014-07-30 03:37:17.105958"
end_time:"2014-07-30 07:04:48.110311"
duration:"3:27:31.004353"
channel:ZS
tip_num:7
lin_pos:1.3223468375677119
tip_offset:-84.393034256504336
wheel_pos:96
target:6
target_type:SILICON
x_orig:43476
y_orig:43476
xsteps:256
x_step:8
x_step_nm:30.510719999999999
xlen_um:7.8107443199999995
ysteps:256
y_step:8
y_step_nm:30.510719999999999
ylen_um:7.8107443199999995
z_step:4.0
z_ret:372
z_ret_nm:61.008000000000003
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:4
ac_gain:4
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:5.8382543678950185
set_pt:4.6706340123598071
fadj:4.9623865110246435
ctrl_image:False
mag_phase:False
work_pt:5.254384388079898
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-88.298406416504335
y_orig_um:3.9053721599999998