filename:TLM__MD_M005_S010_TARGET_SCAN__________COUNT_04.DAT
scan_file:SCAN_MD_M005_S010_2014-07-31T012005Z_TGT06
sw_ver:660
start_time:"2014-07-31 01:20:05.133290"
end_time:"2014-07-31 04:46:56.137630"
duration:"3:26:51.004340"
channel:ZS
tip_num:7
lin_pos:1.3470664530403602
tip_offset:-41.133707179369743
wheel_pos:96
target:6
target_type:SILICON
x_orig:43476
y_orig:43476
xsteps:256
x_step:8
x_step_nm:30.510719999999999
xlen_um:7.8107443199999995
ysteps:256
y_step:8
y_step_nm:30.510719999999999
ylen_um:7.8107443199999995
z_step:4.0
z_ret:372
z_ret_nm:61.008000000000003
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:4
ac_gain:4
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:5.7299153124284725
set_pt:4.5839627679865718
fadj:4.8702220187685974
ctrl_image:False
mag_phase:False
work_pt:5.1568800647340165
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-45.039079339369742
y_orig_um:3.9053721599999998