filename:TLM__MD_M005_S010_TARGET_SCAN__________COUNT_04.DAT
scan_file:SCAN_MD_M005_S010_2014-07-31T234842Z_TGT06
sw_ver:660
start_time:"2014-07-31 23:48:42.161584"
end_time:"2014-08-01 09:15:50.173483"
duration:"9:27:08.011899"
channel:ZS
tip_num:7
lin_pos:1.373311970702678
tip_offset:4.7959487296863159
wheel_pos:96
target:6
target_type:SILICON
x_orig:43540
y_orig:43540
xsteps:480
x_step:4
x_step_nm:15.25536
xlen_um:7.3225727999999997
ysteps:480
y_step:4
y_step_nm:15.25536
ylen_um:7.3225727999999997
z_step:4.0
z_ret:186
z_ret_nm:30.504000000000001
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:4
ac_gain:4
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:5.6878004119935905
set_pt:4.5500877393759058
fadj:4.8345159075303279
ctrl_image:False
mag_phase:False
work_pt:5.1189769756587165
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:1.1346623296863214
y_orig_um:3.6612863999999998