filename:TLM__MD_M006_S012_TARGET_SCAN__________COUNT_02.DAT
scan_file:SCAN_MD_M006_S012_2014-08-12T003753Z_TGT05
sw_ver:660
start_time:"2014-08-12 00:37:53.494941"
end_time:"2014-08-12 08:49:12.505249"
duration:"8:11:19.010308"
channel:ZS
tip_num:7
lin_pos:1.321736476691844
tip_offset:-85.461165789273082
wheel_pos:80
target:5
target_type:SILICON
x_orig:42564
y_orig:27312
xsteps:352
x_step:11
x_step_nm:41.952239999999996
xlen_um:14.76718848
ysteps:352
y_step:31
y_step_nm:43.055559000000002
ylen_um:15.155556768
z_step:4.0
z_ret:525
z_ret_nm:86.100000000000009
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:4
ac_gain:4
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:4.1948577096208126
set_pt:3.3559166857404445
fadj:3.5655756466010526
ctrl_image:False
mag_phase:False
work_pt:3.7753399339459093
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-92.844760029273075
y_orig_um:7.577778384000001