filename:TLM__MD_M006_S013_TARGET_SCAN__________COUNT_03.DAT
scan_file:SCAN_MD_M006_S013_2014-08-13T002019Z_TGT05
sw_ver:661
start_time:"2014-08-13 00:20:19.524784"
end_time:"2014-08-13 05:58:23.531877"
duration:"5:38:04.007093"
channel:ZS
tip_num:7
lin_pos:1.4248874647135119
tip_offset:95.053063248645714
wheel_pos:80
target:5
target_type:SILICON
x_orig:39220
y_orig:40100
xsteps:192
x_step:55
x_step_nm:209.7612
xlen_um:40.274150399999996
ysteps:160
y_step:55
y_step_nm:209.7612
ylen_um:33.561792000000004
z_step:4.0
z_ret:2558
z_ret_nm:419.512
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:4
ac_gain:4
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:5.1985961699855032
set_pt:4.1588464179446092
fadj:4.4185549706263831
ctrl_image:False
mag_phase:False
work_pt:4.678696890240558
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:74.915988048645715
y_orig_um:16.780895999999998