filename:TLM__MD_M006_S013_TARGET_SCAN__________COUNT_03.DAT
scan_file:SCAN_MD_M006_S013_2014-08-14T122844Z_TGT05
sw_ver:661
start_time:"2014-08-14 12:28:44.564007"
end_time:"2014-08-14 19:14:30.572278"
duration:"6:45:46.008271"
channel:ZS
tip_num:7
lin_pos:1.2530708781567101
tip_offset:-205.62596322575735
wheel_pos:80
target:5
target_type:SILICON
x_orig:39220
y_orig:39220
xsteps:192
x_step:55
x_step_nm:209.7612
xlen_um:40.274150399999996
ysteps:192
y_step:55
y_step_nm:209.7612
ylen_um:40.274150399999996
z_step:4.0
z_ret:2558
z_ret_nm:419.512
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:4
ac_gain:4
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:5.149156939040207
set_pt:4.1191729610131986
fadj:4.3767452506294351
ctrl_image:False
mag_phase:False
work_pt:4.634201959586945
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-225.76303842575734
y_orig_um:20.137075199999998