filename:TLM__MD_M006_S013_TARGET_SCAN__________COUNT_03.DAT
scan_file:SCAN_MD_M006_S013_2014-08-14T205054Z_TGT05
sw_ver:661
start_time:"2014-08-14 20:50:54.574242"
end_time:"2014-08-14 21:45:15.575350"
duration:"0:54:21.001108"
channel:ZS
tip_num:7
lin_pos:1.2530708781567101
tip_offset:-205.62596322575735
wheel_pos:80
target:5
target_type:SILICON
x_orig:43988
y_orig:43988
xsteps:128
x_step:8
x_step_nm:30.510719999999999
xlen_um:3.9053721599999998
ysteps:128
y_step:8
y_step_nm:30.510719999999999
ylen_um:3.9053721599999998
z_step:4.0
z_ret:372
z_ret_nm:61.008000000000003
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:4
ac_gain:4
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:5.1284046692606999
set_pt:4.1026932173647666
fadj:4.3590447852292673
ctrl_image:False
mag_phase:False
work_pt:4.615525075115058
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-207.57864930575735
y_orig_um:1.9526860799999999