filename:TLM__MD_M006_S013_TARGET_SCAN__________COUNT_03.DAT
scan_file:SCAN_MD_M006_S013_2014-08-16T002841Z_TGT05
sw_ver:661
start_time:"2014-08-16 00:28:41.608033"
end_time:"2014-08-16 07:35:46.616738"
duration:"7:07:05.008705"
channel:ZS
tip_num:7
lin_pos:1.304951552605478
tip_offset:-114.83478294041359
wheel_pos:80
target:5
target_type:SILICON
x_orig:39220
y_orig:39220
xsteps:192
x_step:55
x_step_nm:209.7612
xlen_um:40.274150399999996
ysteps:192
y_step:55
y_step_nm:209.7612
ylen_um:40.274150399999996
z_step:4.0
z_ret:2558
z_ret_nm:419.512
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:4
ac_gain:4
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:4.9190508888380258
set_pt:3.9351491569390404
fadj:4.1811245899137859
ctrl_image:False
mag_phase:False
work_pt:4.427108270001612
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-134.97185814041359
y_orig_um:20.137075199999998