filename:TLM__MD_M006_S013_TARGET_SCAN__________COUNT_03.DAT
scan_file:SCAN_MD_M006_S013_2014-08-18T002840Z_TGT05
sw_ver:661
start_time:"2014-08-18 00:28:40.666735"
end_time:"2014-08-18 07:13:43.674991"
duration:"6:45:03.008256"
channel:ZS
tip_num:7
lin_pos:1.373311970702678
tip_offset:4.7959487296863159
wheel_pos:80
target:5
target_type:SILICON
x_orig:39220
y_orig:39220
xsteps:192
x_step:55
x_step_nm:209.7612
xlen_um:40.274150399999996
ysteps:192
y_step:55
y_step_nm:209.7612
ylen_um:40.274150399999996
z_step:4.0
z_ret:2558
z_ret_nm:419.512
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:4
ac_gain:4
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:5.6633859769588764
set_pt:4.5305561913481345
fadj:4.8137636377508208
ctrl_image:False
mag_phase:False
work_pt:5.097004170397673
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-15.341126470313682
y_orig_um:20.137075199999998