filename:TLM__MD_M006_S013_TARGET_SCAN__________COUNT_03.DAT
scan_file:SCAN_MD_M006_S013_2014-08-18T122844Z_TGT05
sw_ver:661
start_time:"2014-08-18 12:28:44.681412"
end_time:"2014-08-18 19:16:17.689719"
duration:"6:47:33.008307"
channel:ZS
tip_num:7
lin_pos:1.3904020752269779
tip_offset:34.703631647211196
wheel_pos:80
target:5
target_type:SILICON
x_orig:39220
y_orig:39220
xsteps:192
x_step:55
x_step_nm:209.7612
xlen_um:40.274150399999996
ysteps:192
y_step:55
y_step_nm:209.7612
ylen_um:40.274150399999996
z_step:4.0
z_ret:2558
z_ret_nm:419.512
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:4
ac_gain:4
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:5.8742656595712219
set_pt:4.6993209735255963
fadj:4.9929045548180362
ctrl_image:False
mag_phase:False
work_pt:5.286794275839937
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:14.566556447211198
y_orig_um:20.137075199999998