filename:TLM__MD_M006_S013_TARGET_SCAN__________COUNT_03.DAT
scan_file:SCAN_MD_M006_S013_2014-08-18T205112Z_TGT05
sw_ver:661
start_time:"2014-08-18 20:51:12.691653"
end_time:"2014-08-18 21:49:06.692834"
duration:"0:57:54.001181"
channel:ZS
tip_num:7
lin_pos:1.3904020752269779
tip_offset:34.703631647211196
wheel_pos:80
target:5
target_type:SILICON
x_orig:43988
y_orig:43988
xsteps:128
x_step:8
x_step_nm:30.510719999999999
xlen_um:3.9053721599999998
ysteps:128
y_step:8
y_step_nm:30.510719999999999
ylen_um:3.9053721599999998
z_step:4.0
z_ret:372
z_ret_nm:61.008000000000003
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:4
ac_gain:4
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:5.7302204928664064
set_pt:4.5839627679865718
fadj:4.8705271992065313
ctrl_image:False
mag_phase:False
work_pt:5.1571547247997795
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:32.75094556721119
y_orig_um:1.9526860799999999