filename:TLM__MD_M006_S013_TARGET_SCAN__________COUNT_03.DAT
scan_file:SCAN_MD_M006_S013_2014-08-19T002907Z_TGT05
sw_ver:661
start_time:"2014-08-19 00:29:07.696095"
end_time:"2014-08-19 07:18:39.704443"
duration:"6:49:32.008348"
channel:ZS
tip_num:7
lin_pos:1.4081025406271459
tip_offset:65.679446097505206
wheel_pos:80
target:5
target_type:SILICON
x_orig:39220
y_orig:39220
xsteps:192
x_step:55
x_step_nm:209.7612
xlen_um:40.274150399999996
ysteps:192
y_step:55
y_step_nm:209.7612
ylen_um:40.274150399999996
z_step:4.0
z_ret:2558
z_ret_nm:419.512
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:4
ac_gain:4
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:5.4036774242771042
set_pt:4.32272831311513
fadj:4.5931181811245896
ctrl_image:False
mag_phase:False
work_pt:4.8632684544333245
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:45.542370897505208
y_orig_um:20.137075199999998