filename:TLM__MD_M006_S013_TARGET_SCAN__________COUNT_03.DAT
scan_file:SCAN_MD_M006_S013_2014-08-19T085116Z_TGT05
sw_ver:661
start_time:"2014-08-19 08:51:16.706331"
end_time:"2014-08-19 09:49:25.707516"
duration:"0:58:09.001185"
channel:ZS
tip_num:7
lin_pos:1.4081025406271459
tip_offset:65.679446097505206
wheel_pos:80
target:5
target_type:SILICON
x_orig:43988
y_orig:43988
xsteps:128
x_step:8
x_step_nm:30.510719999999999
xlen_um:3.9053721599999998
ysteps:128
y_step:8
y_step_nm:30.510719999999999
ylen_um:3.9053721599999998
z_step:4.0
z_ret:372
z_ret_nm:61.008000000000003
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:4
ac_gain:4
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:5.10276951247425
set_pt:4.0822461280231934
fadj:4.3373769741359585
ctrl_image:False
mag_phase:False
work_pt:4.592453629590963
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:63.7267600175052
y_orig_um:1.9526860799999999