filename:TLM__MD_M006_S014_TARGET_SCAN__________COUNT_04.DAT
scan_file:SCAN_MD_M006_S014_2014-08-24T003516Z_TGT07
sw_ver:661
start_time:"2014-08-24 00:35:16.842977"
end_time:"2014-08-24 06:12:55.849859"
duration:"5:37:39.006882"
channel:ZS
tip_num:7
lin_pos:1.3589684901197834
tip_offset:-20.305142290379209
wheel_pos:112
target:7
target_type:SILICON
x_orig:39220
y_orig:40100
xsteps:192
x_step:55
x_step_nm:209.7612
xlen_um:40.274150399999996
ysteps:160
y_step:55
y_step_nm:209.7612
ylen_um:33.561792000000004
z_step:4.0
z_ret:2558
z_ret_nm:419.512
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:4
ac_gain:4
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:4.8729686427100027
set_pt:3.8982223239490352
fadj:4.1420614938582432
ctrl_image:False
mag_phase:False
work_pt:4.385634600071392
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-40.442217490379207
y_orig_um:16.780895999999998