filename:TLM__MD_M006_S014_TARGET_SCAN__________COUNT_04.DAT
scan_file:SCAN_MD_M006_S014_2014-08-24T121839Z_TGT07
sw_ver:661
start_time:"2014-08-24 12:18:39.857314"
end_time:"2014-08-24 19:04:04.865577"
duration:"6:45:25.008263"
channel:ZS
tip_num:7
lin_pos:1.3769741359578851
tip_offset:11.20473792629879
wheel_pos:112
target:7
target_type:SILICON
x_orig:39220
y_orig:39220
xsteps:192
x_step:55
x_step_nm:209.7612
xlen_um:40.274150399999996
ysteps:192
y_step:55
y_step_nm:209.7612
ylen_um:40.274150399999996
z_step:4.0
z_ret:2558
z_ret_nm:419.512
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:4
ac_gain:4
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:4.8998245212481883
set_pt:3.9198901350423441
fadj:4.1646448462653538
ctrl_image:False
mag_phase:False
work_pt:4.40980468585854
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-8.9323372737012079
y_orig_um:20.137075199999998