filename:TLM__MD_M006_S014_TARGET_SCAN__________COUNT_04.DAT
scan_file:SCAN_MD_M006_S014_2014-08-24T204226Z_TGT07
sw_ver:661
start_time:"2014-08-24 20:42:26.867582"
end_time:"2014-08-24 21:49:39.868953"
duration:"1:07:13.001371"
channel:ZS
tip_num:7
lin_pos:1.3769741359578851
tip_offset:11.20473792629879
wheel_pos:112
target:7
target_type:SILICON
x_orig:43860
y_orig:43988
xsteps:160
x_step:8
x_step_nm:30.510719999999999
xlen_um:4.8817151999999995
ysteps:128
y_step:8
y_step_nm:30.510719999999999
ylen_um:3.9053721599999998
z_step:4.0
z_ret:372
z_ret_nm:61.008000000000003
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:4
ac_gain:4
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:4.9697108415350577
set_pt:3.9757381551842528
fadj:4.2241550316624696
ctrl_image:False
mag_phase:False
work_pt:4.472701840918277
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:8.7638803262987892
y_orig_um:1.9526860799999999