filename:TLM__MD_M006_S015_TARGET_SCAN__________COUNT_05.DAT
scan_file:SCAN_MD_M006_S015_2014-08-25T210610Z_TGT07
sw_ver:661
start_time:"2014-08-25 21:06:10.897417"
end_time:"2014-08-25 22:03:30.898586"
duration:"0:57:20.001169"
channel:ZS
tip_num:7
lin_pos:1.4129854276340887
tip_offset:74.224498359655172
wheel_pos:112
target:7
target_type:SILICON
x_orig:43988
y_orig:43988
xsteps:128
x_step:8
x_step_nm:30.510719999999999
xlen_um:3.9053721599999998
ysteps:128
y_step:8
y_step_nm:30.510719999999999
ylen_um:3.9053721599999998
z_step:4.0
z_ret:372
z_ret_nm:61.008000000000003
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:4
ac_gain:4
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:4.8522163729304957
set_pt:3.8817425803006032
fadj:4.1243610284580754
ctrl_image:False
mag_phase:False
work_pt:4.366957715599505
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:72.271812279655165
y_orig_um:1.9526860799999999