filename:TLM__MD_M007_S017_TARGET_SCAN__________COUNT_02.DAT scan_file:SCAN_MD_M007_S017_2014-09-15T210556Z_TGT07 sw_ver:661 start_time:"2014-09-15 21:05:56.508997" end_time:"2014-09-16 05:14:55.518965" duration:"8:08:59.009968" channel:ZS tip_num:7 lin_pos:1.2668039978637369 tip_offset:-181.59300373846057 wheel_pos:112 target:7 target_type:SILICON x_orig:39220 y_orig:39220 xsteps:192 x_step:55 x_step_nm:209.7612 xlen_um:40.274150399999996 ysteps:192 y_step:55 y_step_nm:209.7612 ylen_um:40.274150399999996 z_step:4.0 z_ret:3198 z_ret_nm:524.47199999999998 x_dir:L_H y_dir:L_H fast_dir:X scan_type:DYN exc_lvl:4 ac_gain:4 x_closed:False y_closed:False aborted:False dummy:False res_amp:3.9751277943083849 set_pt:3.1801327534905006 fadj:3.3788052185854891 ctrl_image:False mag_phase:False work_pt:3.577584686596519 set_pt_per:80.0 work_pt_per:-89.99923704890517 xy_settle:50 z_settle:50 x_orig_um:-201.73007893846057 y_orig_um:20.137075199999998