filename:TLM__MD_M007_S017_TARGET_SCAN__________COUNT_02.DAT
scan_file:SCAN_MD_M007_S017_2014-09-16T072413Z_TGT07
sw_ver:661
start_time:"2014-09-16 07:24:13.521600"
end_time:"2014-09-16 09:32:58.524225"
duration:"2:08:45.002625"
channel:ZS
tip_num:7
lin_pos:1.2668039978637369
tip_offset:-181.59300373846057
wheel_pos:112
target:7
target_type:SILICON
x_orig:43732
y_orig:43732
xsteps:192
x_step:8
x_step_nm:30.510719999999999
xlen_um:5.8580582400000001
ysteps:192
y_step:8
y_step_nm:30.510719999999999
ylen_um:5.8580582400000001
z_step:4.0
z_ret:465
z_ret_nm:76.260000000000005
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:4
ac_gain:4
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:4.3749141680018315
set_pt:3.4999618524452583
fadj:3.7184710460059502
ctrl_image:False
mag_phase:False
work_pt:3.9373893727461056
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-184.52203285846056
y_orig_um:2.92902912