filename:TLM__MD_M008_S019_TARGET_SCAN__________COUNT_01.DAT
scan_file:SCAN_MD_M008_S019_2014-09-25T131058Z_TGT10
sw_ver:661
start_time:"2014-09-25 13:10:58.784022"
end_time:"2014-09-25 17:41:34.789395"
duration:"4:30:36.005373"
channel:ZS
tip_num:5
lin_pos:3.0847638666361488
tip_offset:-80.413233386739591
wheel_pos:160
target:10
target_type:SOLGEL
x_orig:43220
y_orig:29184
xsteps:256
x_step:10
x_step_nm:38.138399999999997
xlen_um:9.763430399999999
ysteps:256
y_step:28
y_step_nm:38.888891999999998
ylen_um:9.9555563520000003
z_step:4.0
z_ret:593
z_ret_nm:97.25200000000001
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:3
ac_gain:3
x_closed:False
y_closed:True
aborted:False
dummy:False
res_amp:4.8000305180437941
set_pt:3.8399328603036551
fadj:4.079804684519722
ctrl_image:False
mag_phase:False
work_pt:4.319990844354025
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-85.294948586739594
y_orig_um:4.9777781760000002