filename:TLM__MD_M009_S026_TARGET_EXPOSE_SCAN___COUNT_02.DAT
scan_file:SCAN_MD_M009_S026_2014-10-30T104347Z_TGT10
sw_ver:661
start_time:"2014-10-30 10:43:47.781940"
end_time:"2014-10-30 15:52:07.788063"
duration:"5:08:20.006123"
channel:ZS
tip_num:5
lin_pos:3.0847638666361488
tip_offset:-80.413233386739591
wheel_pos:160
target:10
target_type:SOLGEL
x_orig:43156
y_orig:44020
xsteps:320
x_step:3
x_step_nm:11.441520000000001
xlen_um:3.6612863999999998
ysteps:320
y_step:3
y_step_nm:11.441520000000001
ylen_um:3.6612863999999998
z_step:
z_ret:140
z_ret_nm:22.960000000000001
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:3
ac_gain:3
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:7.0713359273670555
set_pt:5.6568245975432978
fadj:0.0
ctrl_image:False
mag_phase:False
work_pt:
set_pt_per:
work_pt_per:
xy_settle:
z_settle:
x_orig_um:-85.539034346739598
y_orig_um:1.8306431999999999