filename:TLM__MD_M009_S026_TARGET_EXPOSE_SCAN___COUNT_02.DAT scan_file:SCAN_MD_M009_S026_2014-10-31T051040Z_TGT10 sw_ver:661 start_time:"2014-10-31 05:10:40.803921" end_time:"2014-10-31 10:48:24.810627" duration:"5:37:44.006706" channel:ZS tip_num:5 lin_pos:3.0850690470740827 tip_offset:-79.879167620355219 wheel_pos:160 target:10 target_type:SOLGEL x_orig:37332 y_orig:37332 xsteps:256 x_step:20 x_step_nm:76.276799999999994 xlen_um:19.526860799999998 ysteps:256 y_step:20 y_step_nm:76.276799999999994 ylen_um:19.526860799999998 z_step: z_ret:930 z_ret_nm:152.52000000000001 x_dir:L_H y_dir:L_H fast_dir:X scan_type:DYN exc_lvl:3 ac_gain:3 x_closed:False y_closed:False aborted:False dummy:False res_amp:7.5648126955062178 set_pt:6.0517280842298007 fadj:0.0 ctrl_image:False mag_phase:False work_pt: set_pt_per: work_pt_per: xy_settle: z_settle: x_orig_um:-107.21677274035522 y_orig_um:27.337605119999999