filename:TLM__MD_M009_S026_TARGET_EXPOSE_SCAN___COUNT_02.DAT
scan_file:SCAN_MD_M009_S026_2014-11-02T153534Z_TGT10
sw_ver:661
start_time:"2014-11-02 15:35:34.873521"
end_time:"2014-11-02 21:23:10.880423"
duration:"5:47:36.006902"
channel:ZS
tip_num:5
lin_pos:3.0850690470740827
tip_offset:-79.879167620355219
wheel_pos:160
target:10
target_type:SOLGEL
x_orig:46548
y_orig:46548
xsteps:256
x_step:20
x_step_nm:76.276799999999994
xlen_um:19.526860799999998
ysteps:256
y_step:20
y_step_nm:76.276799999999994
ylen_um:19.526860799999998
z_step:
z_ret:930
z_ret_nm:152.52000000000001
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:3
ac_gain:3
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:7.039902342259861
set_pt:5.6317998016327158
fadj:0.0
ctrl_image:False
mag_phase:False
work_pt:
set_pt_per:
work_pt_per:
xy_settle:
z_settle:
x_orig_um:-72.068423300355221
y_orig_um:-7.8107443199999995