filename:TLM__MD_M009_S026_TARGET_EXPOSE_SCAN___COUNT_02.DAT
scan_file:SCAN_MD_M009_S026_2014-11-02T230959Z_TGT10
sw_ver:661
start_time:"2014-11-02 23:09:59.882545"
end_time:"2014-11-03 07:01:19.891904"
duration:"7:51:20.009359"
channel:ZS
tip_num:5
lin_pos:3.0850690470740827
tip_offset:-79.879167620355219
wheel_pos:160
target:10
target_type:SOLGEL
x_orig:44260
y_orig:44260
xsteps:480
x_step:1
x_step_nm:3.8138399999999999
xlen_um:1.8306431999999999
ysteps:480
y_step:1
y_step_nm:3.8138399999999999
ylen_um:1.8306431999999999
z_step:
z_ret:47
z_ret_nm:7.7080000000000002
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:3
ac_gain:3
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:7.0624856946669716
set_pt:5.6498054474708175
fadj:0.0
ctrl_image:False
mag_phase:False
work_pt:
set_pt_per:
work_pt_per:
xy_settle:
z_settle:
x_orig_um:-80.794489220355231
y_orig_um:0.91532159999999996