filename:TLM__MD_M009_S026_TARGET_EXPOSE_SCAN___COUNT_02.DAT scan_file:SCAN_MD_M009_S026_2014-11-03T142441Z_TGT10 sw_ver:661 start_time:"2014-11-03 14:24:41.900709" end_time:"2014-11-04 00:36:26.912857" duration:"10:11:45.012148" channel:ZS tip_num:5 lin_pos:3.121690699626154 tip_offset:-15.791275654230489 wheel_pos:160 target:10 target_type:SOLGEL x_orig:36580 y_orig:39220 xsteps:288 x_step:55 x_step_nm:209.7612 xlen_um:60.411225599999995 ysteps:192 y_step:55 y_step_nm:209.7612 ylen_um:40.274150399999996 z_step: z_ret:2558 z_ret_nm:419.512 x_dir:L_H y_dir:L_H fast_dir:X scan_type:DYN exc_lvl:3 ac_gain:3 x_closed:False y_closed:False aborted:False dummy:False res_amp:7.5764095521477071 set_pt:6.0608834973678185 fadj:0.0 ctrl_image:False mag_phase:False work_pt: set_pt_per: work_pt_per: xy_settle: z_settle: x_orig_um:-45.996888454230486 y_orig_um:20.137075199999998