filename:TLM__MD_M009_S026_TARGET_EXPOSE_SCAN___COUNT_02.DAT scan_file:SCAN_MD_M009_S026_2014-11-04T033334Z_TGT10 sw_ver:661 start_time:"2014-11-04 03:33:34.916374" end_time:"2014-11-04 10:23:20.924511" duration:"6:49:46.008137" channel:ZS tip_num:5 lin_pos:3.121690699626154 tip_offset:-15.791275654230489 wheel_pos:160 target:10 target_type:SOLGEL x_orig:41908 y_orig:41908 xsteps:288 x_step:18 x_step_nm:68.649119999999996 xlen_um:19.770946559999999 ysteps:288 y_step:18 y_step_nm:68.649119999999996 ylen_um:19.770946559999999 z_step: z_ret:837 z_ret_nm:137.268 x_dir:L_H y_dir:L_H fast_dir:X scan_type:DYN exc_lvl:3 ac_gain:3 x_closed:False y_closed:False aborted:False dummy:False res_amp:7.4583047226672772 set_pt:5.966582742046235 fadj:0.0 ctrl_image:False mag_phase:False work_pt: set_pt_per: work_pt_per: xy_settle: z_settle: x_orig_um:-25.676748934230488 y_orig_um:9.8854732799999994