filename:TLM__MD_M009_S026_TARGET_EXPOSE_SCAN___COUNT_02.DAT scan_file:SCAN_MD_M009_S026_2014-11-04T114326Z_TGT10 sw_ver:661 start_time:"2014-11-04 11:43:26.926102" end_time:"2014-11-04 15:20:26.930411" duration:"3:37:00.004309" channel:ZS tip_num:5 lin_pos:3.121690699626154 tip_offset:-15.791275654230489 wheel_pos:160 target:10 target_type:SOLGEL x_orig:42554 y_orig:42554 xsteps:256 x_step:8 x_step_nm:30.510719999999999 xlen_um:7.8107443199999995 ysteps:256 y_step:8 y_step_nm:30.510719999999999 ylen_um:7.8107443199999995 z_step: z_ret:372 z_ret_nm:61.008000000000003 x_dir:L_H y_dir:L_H fast_dir:X scan_type:DYN exc_lvl:3 ac_gain:3 x_closed:False y_closed:False aborted:False dummy:False res_amp:7.3551537346456088 set_pt:5.8838788433661406 fadj:0.0 ctrl_image:False mag_phase:False work_pt: set_pt_per: work_pt_per: xy_settle: z_settle: x_orig_um:-23.213008294230491 y_orig_um:7.4217326399999992