filename:TLM__MD_M009_S027_TARGET_EXPOSE_SCAN___COUNT_03.DAT
scan_file:SCAN_MD_M009_S027_2014-11-06T125810Z_TGT10
sw_ver:661
start_time:"2014-11-06 12:58:10.984777"
end_time:"2014-11-06 19:52:50.993011"
duration:"6:54:40.008234"
channel:ZS
tip_num:5
lin_pos:3.0847638666361488
tip_offset:-80.413233386739591
wheel_pos:160
target:10
target_type:SOLGEL
x_orig:39575
y_orig:39575
xsteps:288
x_step:18
x_step_nm:68.649119999999996
xlen_um:19.770946559999999
ysteps:288
y_step:18
y_step_nm:68.649119999999996
ylen_um:19.770946559999999
z_step:4.0
z_ret:837
z_ret_nm:137.268
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:3
ac_gain:3
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:7.388570992599373
set_pt:5.9108873121232932
fadj:6.2801556420233453
ctrl_image:False
mag_phase:False
work_pt:6.649657522156156
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-99.196395386739596
y_orig_um:18.783161999999997