filename:TLM__MD_M009_S027_TARGET_EXPOSE_SCAN___COUNT_03.DAT scan_file:SCAN_MD_M009_S027_2014-11-08T190747Z_TGT10 sw_ver:661 start_time:"2014-11-08 19:07:47.049307" end_time:"2014-11-08 19:07:47.049307" duration:"0:00:00" channel:ZS tip_num:5 lin_pos:3.0847638666361488 tip_offset:-80.413233386739591 wheel_pos:160 target:10 target_type:SOLGEL x_orig:42150 y_orig:44594 xsteps:160 x_step:25 x_step_nm:95.346000000000004 xlen_um:15.255360000000001 ysteps:160 y_step:25 y_step_nm:95.346000000000004 ylen_um:15.255360000000001 z_step:4.0 z_ret:186 z_ret_nm:30.504000000000001 x_dir:L_H y_dir:L_H fast_dir:X scan_type:DYN exc_lvl:3 ac_gain:3 x_closed:False y_closed:False aborted:False dummy:False res_amp:7.5902952620737025 set_pt:6.0720225833524069 fadj:6.4516670481422125 ctrl_image:False mag_phase:False work_pt:6.83120782562553 set_pt_per:80.0 work_pt_per:-89.99923704890517 xy_settle:50 z_settle:50 x_orig_um:-89.375757386739593 y_orig_um:-0.35850095999999998