filename:TLM__MD_M009_S028_TARGET_EXPOSE_SCAN___COUNT_04.DAT
scan_file:SCAN_MD_M009_S028_2014-11-16T120232Z_TGT10
sw_ver:661
start_time:"2014-11-16 12:02:32.264939"
end_time:"2014-11-16 17:16:44.271166"
duration:"5:14:12.006227"
channel:ZS
tip_num:5
lin_pos:3.1247425040054932
tip_offset:-10.45061799038676
wheel_pos:160
target:10
target_type:SOLGEL
x_orig:33972
y_orig:33972
xsteps:224
x_step:94
x_step_nm:358.50095999999996
xlen_um:80.304215040000003
ysteps:224
y_step:94
y_step_nm:358.50095999999996
ylen_um:80.304215040000003
z_step:4.0
z_ret:4372
z_ret_nm:717.00800000000004
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:3
ac_gain:3
x_closed:False
y_closed:False
aborted:True
dummy:False
res_amp:5.1958495460440979
set_pt:4.1567101548790717
fadj:4.4164187075608456
ctrl_image:False
mag_phase:False
work_pt:4.676224949648691
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-50.602725510386755
y_orig_um:40.152107519999994