filename:TLM__MD_M009_S029_TARGET_EXPOSE_SCAN___COUNT_05.DAT scan_file:SCAN_MD_M009_S029_2014-11-20T071133Z_TGT10 sw_ver:661 start_time:"2014-11-20 07:11:33.373326" end_time:"2014-11-20 11:21:02.378270" duration:"4:09:29.004944" channel:ZS tip_num:7 lin_pos:1.4187838559548334 tip_offset:84.371747920958256 wheel_pos:160 target:10 target_type:SOLGEL x_orig:43220 y_orig:43220 xsteps:256 x_step:10 x_step_nm:38.138399999999997 xlen_um:9.763430399999999 ysteps:256 y_step:10 y_step_nm:38.138399999999997 ylen_um:9.763430399999999 z_step:4.0 z_ret:465 z_ret_nm:76.260000000000005 x_dir:L_H y_dir:L_H fast_dir:X scan_type:DYN exc_lvl:4 ac_gain:4 x_closed:False y_closed:False aborted:False dummy:False res_amp:3.7749294270237286 set_pt:3.0199130235751888 fadj:3.2085145342183559 ctrl_image:False mag_phase:False work_pt:3.3974076834559632 set_pt_per:80.0 work_pt_per:-89.99923704890517 xy_settle:50 z_settle:50 x_orig_um:79.490032720958254 y_orig_um:4.8817151999999995