filename:TLM__MD_M009_S029_TARGET_EXPOSE_SCAN___COUNT_05.DAT
scan_file:SCAN_MD_M009_S029_2014-11-21T044002Z_TGT10
sw_ver:661
start_time:"2014-11-21 04:40:02.398861"
end_time:"2014-11-21 04:40:03.398861"
duration:"0:00:01"
channel:ZS
tip_num:7
lin_pos:1.4419775692378118
tip_offset:124.96074616617059
wheel_pos:160
target:10
target_type:SOLGEL
x_orig:39236
y_orig:39236
xsteps:224
x_step:47
x_step_nm:179.25047999999998
xlen_um:40.152107520000001
ysteps:224
y_step:47
y_step_nm:179.25047999999998
ylen_um:40.152107520000001
z_step:4.0
z_ret:2186
z_ret_nm:358.50400000000002
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:4
ac_gain:4
x_closed:False
y_closed:False
aborted:True
dummy:False
res_amp:0.80125123979552981
set_pt:0.64103150988021618
fadj:0.68101014724956066
ctrl_image:False
mag_phase:False
work_pt:0.7211200026608705
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:104.88469240617059
y_orig_um:20.076053759999997