filename:TLM__MD_M010_S031_TARGET_EXPOSE_SCAN___COUNT_100002.DAT
scan_file:SCAN_MD_M010_S031_2014-11-26T070023Z_TGT10
sw_ver:661
start_time:"2014-11-26 07:00:23.544334"
end_time:"2014-11-26 12:56:44.551397"
duration:"5:56:21.007063"
channel:ZS
tip_num:5
lin_pos:3.121690699626154
tip_offset:-15.791275654230489
wheel_pos:160
target:10
target_type:SOLGEL
x_orig:33972
y_orig:33972
xsteps:224
x_step:94
x_step_nm:358.50095999999996
xlen_um:80.304215040000003
ysteps:224
y_step:94
y_step_nm:358.50095999999996
ylen_um:80.304215040000003
z_step:4.0
z_ret:4372
z_ret_nm:717.00800000000004
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:3
ac_gain:3
x_closed:False
y_closed:False
aborted:True
dummy:False
res_amp:5.6456855115587086
set_pt:4.5165178912031738
fadj:4.7988097962920584
ctrl_image:False
mag_phase:False
work_pt:5.081073886583416
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-55.943383174230483
y_orig_um:40.152107519999994