filename:TLM__MD_M010_S031_TARGET_EXPOSE_SCAN___COUNT_100002.DAT
scan_file:SCAN_MD_M010_S031_2014-11-27T010535Z_TGT10
sw_ver:661
start_time:"2014-11-27 01:05:35.565841"
end_time:"2014-11-27 01:06:15.565855"
duration:"0:00:40.000014"
channel:ZS
tip_num:5
lin_pos:3.121690699626154
tip_offset:-15.791275654230489
wheel_pos:160
target:10
target_type:SOLGEL
x_orig:39834
y_orig:39834
xsteps:288
x_step:18
x_step_nm:68.649119999999996
xlen_um:19.770946559999999
ysteps:288
y_step:18
y_step_nm:68.649119999999996
ylen_um:19.770946559999999
z_step:4.0
z_ret:837
z_ret_nm:137.268
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:3
ac_gain:3
x_closed:False
y_closed:False
aborted:True
dummy:False
res_amp:0.16708628976882522
set_pt:0.13351644159609322
fadj:0.14175631342030925
ctrl_image:False
mag_phase:False
work_pt:0.15037638600526562
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-33.586653094230485
y_orig_um:17.795377439999999