filename:TLM__MD_M010_S031_TARGET_EXPOSE_SCAN___COUNT_100002.DAT
scan_file:SCAN_MD_M010_S031_2014-12-01T213934Z_TGT10
sw_ver:661
start_time:"2014-12-01 21:39:34.704450"
end_time:"2014-12-02 10:58:04.720275"
duration:"13:18:30.015825"
channel:ZS
tip_num:5
lin_pos:3.0847638666361488
tip_offset:-80.413233386739591
wheel_pos:160
target:10
target_type:SOLGEL
x_orig:41796
y_orig:43960
xsteps:416
x_step:13
x_step_nm:49.579920000000001
xlen_um:20.62524672
ysteps:416
y_step:13
y_step_nm:49.579920000000001
ylen_um:20.62524672
z_step:4.0
z_ret:605
z_ret_nm:99.219999999999999
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:3
ac_gain:3
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:5.526359960326543
set_pt:4.4209964141298546
fadj:4.6971847104600588
ctrl_image:False
mag_phase:False
work_pt:4.973681800870067
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-90.725856746739595
y_orig_um:2.0594736