filename:TLM__MD_M010_S031_TARGET_EXPOSE_SCAN___COUNT_100002.DAT
scan_file:SCAN_MD_M010_S031_2014-12-02T113032Z_TGT10
sw_ver:661
start_time:"2014-12-02 11:30:32.720919"
end_time:"2014-12-02 16:31:31.726883"
duration:"5:00:59.005964"
channel:ZS
tip_num:5
lin_pos:3.0847638666361488
tip_offset:-80.413233386739591
wheel_pos:160
target:10
target_type:SOLGEL
x_orig:46123
y_orig:43960
xsteps:416
x_step:13
x_step_nm:49.579920000000001
xlen_um:20.62524672
ysteps:416
y_step:13
y_step_nm:49.579920000000001
ylen_um:20.62524672
z_step:4.0
z_ret:605
z_ret_nm:99.219999999999999
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:3
ac_gain:3
x_closed:False
y_closed:False
aborted:True
dummy:False
res_amp:5.5718318455786982
set_pt:4.4573128862439919
fadj:4.7359426260776676
ctrl_image:False
mag_phase:False
work_pt:5.014606150668761
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-74.223371066739602
y_orig_um:2.0594736