filename:TLM__MD_M010_S033_TARGET_EXPOSE_SCAN___COUNT_100004.DAT
scan_file:SCAN_MD_M010_S033_2014-12-11T180733Z_TGT10
sw_ver:661
start_time:"2014-12-11 18:07:33.985632"
end_time:"2014-12-12 01:11:18.994030"
duration:"7:03:45.008398"
channel:ZS
tip_num:7
lin_pos:1.4187838559548334
tip_offset:84.371747920958256
wheel_pos:160
target:10
target_type:SOLGEL
x_orig:34972
y_orig:34972
xsteps:448
x_step:23
x_step_nm:87.718319999999991
xlen_um:39.29780736
ysteps:448
y_step:23
y_step_nm:87.718319999999991
ylen_um:39.29780736
z_step:4.0
z_ret:1578
z_ret_nm:258.79200000000003
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:4
ac_gain:4
x_closed:False
y_closed:False
aborted:True
dummy:False
res_amp:4.2088960097657733
set_pt:3.3669031815060659
fadj:3.5774776836804758
ctrl_image:False
mag_phase:False
work_pt:3.7879742969710093
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:48.033480400958268
y_orig_um:36.338267519999995