filename:TLM__MD_M011_S035_TARGET_EXPOSE_SCAN___COUNT_110001.DAT
scan_file:SCAN_MD_M011_S035_2014-12-20T081844Z_TGT03
sw_ver:661
start_time:"2014-12-20 08:18:44.230808"
end_time:"2014-12-20 13:56:13.237496"
duration:"5:37:29.006688"
channel:ZS
tip_num:5
lin_pos:3.0850690470740827
tip_offset:-79.879167620355219
wheel_pos:48
target:3
target_type:CAL
x_orig:32000
y_orig:32000
xsteps:256
x_step:10
x_step_nm:38.138399999999997
xlen_um:9.763430399999999
ysteps:256
y_step:10
y_step_nm:38.138399999999997
ylen_um:9.763430399999999
z_step:4.0
z_ret:930
z_ret_nm:152.52000000000001
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:3
ac_gain:3
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:5.5965514610513463
set_pt:4.4771496147096972
fadj:4.7570000762951103
ctrl_image:False
mag_phase:False
work_pt:5.036853615995567
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-127.55216762035522
y_orig_um:47.672999999999995