filename:TLM__MD_M011_S038_TARGET_EXPOSE_SCAN___COUNT_110004.DAT
scan_file:SCAN_MD_M011_S038_2015-01-12T002921Z_TGT10
sw_ver:661
start_time:"2015-01-12 00:29:21.877887"
end_time:"2015-01-12 09:40:58.888820"
duration:"9:11:37.010933"
channel:ZS
tip_num:5
lin_pos:3.0847638666361488
tip_offset:-80.413233386739591
wheel_pos:160
target:10
target_type:SOLGEL
x_orig:34004
y_orig:34004
xsteps:256
x_step:82
x_step_nm:312.73487999999998
xlen_um:80.060129279999998
ysteps:256
y_step:82
y_step_nm:312.73487999999998
ylen_um:80.060129279999998
z_step:4.0
z_ret:8581
z_ret_nm:1407.2840000000001
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:3
ac_gain:3
x_closed:False
y_closed:False
aborted:True
dummy:False
res_amp:5.673151750972762
set_pt:4.5384908827344166
fadj:4.8220035095750369
ctrl_image:False
mag_phase:False
work_pt:5.10579329250209
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-120.4432980267396
y_orig_um:40.030064639999999