filename:TLM__MD_M012_S039_TARGET_EXPOSE_SCAN___COUNT_120001.DAT
scan_file:SCAN_MD_M012_S039_2015-01-15T215659Z_TGT12
sw_ver:663
start_time:"2015-01-15 21:56:59.989021"
end_time:"2015-01-15 21:57:57.989040"
duration:"0:00:58.000019"
channel:ZS
tip_num:7
lin_pos:1.4316014343480583
tip_offset:106.80251010910192
wheel_pos:192
target:12
target_type:SOLGEL
x_orig:39220
y_orig:39220
xsteps:192
x_step:55
x_step_nm:209.7612
xlen_um:40.274150399999996
ysteps:192
y_step:55
y_step_nm:209.7612
ylen_um:40.274150399999996
z_step:4.0
z_ret:3837
z_ret_nm:629.26800000000003
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:4
ac_gain:4
x_closed:False
y_closed:False
aborted:True
dummy:False
res_amp:4.1445029373617146
set_pt:3.3156328679331661
fadj:3.5228503852903028
ctrl_image:False
mag_phase:False
work_pt:3.7300210230950075
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:86.665434909101918
y_orig_um:20.137075199999998