filename:TLM__MD_M012_S042_TARGET_EXPOSE_SCAN___COUNT_120004.DAT
scan_file:SCAN_MD_M012_S042_2015-02-04T105233Z_TGT04
sw_ver:663
start_time:"2015-02-04 10:52:33.535564"
end_time:"2015-02-04 12:32:35.537501"
duration:"1:40:02.001937"
channel:ZS
tip_num:11
lin_pos:-2.2049286640726331
tip_offset:1.6248378728918005
wheel_pos:64
target:4
target_type:SILICON
x_orig:43540
y_orig:43540
xsteps:128
x_step:15
x_step_nm:57.207599999999999
xlen_um:7.3225727999999997
ysteps:128
y_step:15
y_step_nm:57.207599999999999
ylen_um:7.3225727999999997
z_step:4.0
z_ret:698
z_ret_nm:114.47200000000001
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:1
ac_gain:3
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:8.3834592202639797
set_pt:6.7067978942549793
fadj:7.1258106355382616
ctrl_image:False
mag_phase:False
work_pt:7.545049336543676
set_pt_per:80.0
work_pt_per:89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-2.0364485271081989
y_orig_um:3.6612863999999998