filename:TLM__MD_M012_S042_TARGET_EXPOSE_SCAN___COUNT_120004.DAT
scan_file:SCAN_MD_M012_S042_2015-02-04T191053Z_TGT11
sw_ver:663
start_time:"2015-02-04 19:10:53.545214"
end_time:"2015-02-05 17:13:19.570824"
duration:"22:02:26.025610"
channel:ZS
tip_num:11
lin_pos:-2.2027924010070956
tip_offset:5.3632982375824101
wheel_pos:176
target:11
target_type:SOLGEL
x_orig:33940
y_orig:33940
xsteps:320
x_step:66
x_step_nm:251.71343999999999
xlen_um:80.548300799999993
ysteps:320
y_step:66
y_step_nm:251.71343999999999
ylen_um:80.548300799999993
z_step:4.0
z_ret:3070
z_ret_nm:503.48000000000002
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:2
ac_gain:2
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:9.002059967956054
set_pt:7.2014953841458755
fadj:7.6516365300984219
ctrl_image:False
mag_phase:False
work_pt:8.101785289845365
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:-34.910852162417584
y_orig_um:40.274150399999996