filename:TLM__MD_M012_S042_TARGET_EXPOSE_SCAN___COUNT_120004.DAT
scan_file:SCAN_MD_M012_S042_2015-02-06T002847Z_TGT11
sw_ver:663
start_time:"2015-02-06 00:28:47.579257"
end_time:"2015-02-06 05:58:30.585642"
duration:"5:29:43.006385"
channel:ZS
tip_num:11
lin_pos:-2.2027924010070956
tip_offset:5.3632982375824101
wheel_pos:176
target:11
target_type:SOLGEL
x_orig:43220
y_orig:43220
xsteps:320
x_step:8
x_step_nm:30.510719999999999
xlen_um:9.763430399999999
ysteps:320
y_step:8
y_step_nm:30.510719999999999
ylen_um:9.763430399999999
z_step:4.0
z_ret:372
z_ret_nm:61.008000000000003
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:2
ac_gain:2
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:9.052414740215152
set_pt:7.2417792019531539
fadj:7.6943617914091718
ctrl_image:False
mag_phase:False
work_pt:8.147104200696269
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:0.48158303758241061
y_orig_um:4.8817151999999995