filename:TLM__MD_M012_S042_TARGET_EXPOSE_SCAN___COUNT_120004.DAT
scan_file:SCAN_MD_M012_S042_2015-02-06T075505Z_TGT01
sw_ver:663
start_time:"2015-02-06 07:55:05.587900"
end_time:"2015-02-06 13:32:10.594428"
duration:"5:37:05.006528"
channel:ZS
tip_num:11
lin_pos:-2.2027924010070956
tip_offset:5.3632982375824101
wheel_pos:16
target:1
target_type:CAL
x_orig:43220
y_orig:43220
xsteps:256
x_step:10
x_step_nm:38.138399999999997
xlen_um:9.763430399999999
ysteps:256
y_step:10
y_step_nm:38.138399999999997
ylen_um:9.763430399999999
z_step:4.0
z_ret:930
z_ret_nm:152.52000000000001
x_dir:L_H
y_dir:L_H
fast_dir:X
scan_type:DYN
exc_lvl:2
ac_gain:2
x_closed:False
y_closed:False
aborted:False
dummy:False
res_amp:9.107042038605325
set_pt:7.2854200045777056
fadj:7.7407492179751287
ctrl_image:False
mag_phase:False
work_pt:8.196268352467852
set_pt_per:80.0
work_pt_per:-89.99923704890517
xy_settle:50
z_settle:50
x_orig_um:0.48158303758241061
y_orig_um:4.8817151999999995